عنوان

A Computer Game-based Simulation of Integrated Circuit Microfabrication in a Cleanroom Environment

Number

TL51145

.Language of Text, Soundtrack etc

انگلیسی

Title Proper

A Computer Game-based Simulation of Integrated Circuit Microfabrication in a Cleanroom Environment

General Material Designation

[Thesis]

First Statement of Responsibility

Crain, Madison

Subsequent Statement of Responsibility

Seker, Erkin

Name of Publisher, Distributor, etc.

University of California, Davis

Date of Publication, Distribution, etc.

2019

Text of Note

93 p.

Dissertation or thesis details and type of degree

M.S.

Body granting the degree

University of California, Davis

Text preceding or following the note

2019

Text of Note

A computer game-based simulation was created using the Unity engine for teaching the essentials of microfabrication in a clean room environment. The player walks around the different scenes in the microfabrication laboratory to fabricate a field-effect transistor by following a specific set of process steps. Some of these steps include gowning up, depositing and removing materials like aluminum and silicon dioxide, aligning lithography masks, and characterizing the surface of the wafer. To create the functionality in the game, several game development methods were applied such as canvases, ray casters and a reticle, and physics models. A complicated state machine was developed to govern the success of the player. This state machine logs every action of the player and warns them if the player makes a mistake. The simulation will be publicly accessible for further development, and as a teaching and training tool for microfabrication processes.

Subject Term

Electrical engineering

Subject Term

Mass communications

Crain, Madison

Seker, Erkin

University of California, Davis

Electronic name

p

[Thesis]

276903

a

Y