عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
161344110X
(Number (ISBN
9781613441107
NATIONAL BIBLIOGRAPHY NUMBER
Number
b405346
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Fabrication engineering at the micro and nanoscale
General Material Designation
[Book]
First Statement of Responsibility
Stephen A. Campbell.
EDITION STATEMENT
Edition Statement
3rd ed.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York :
Name of Publisher, Distributor, etc.
Oxford University Press,
Date of Publication, Distribution, etc.
2008.
SERIES
Series Title
The Oxford series in electrical and computer engineering
GENERAL NOTES
Text of Note
Rev. ed. of: The science and engineering of microelectronic fabrication. 2nd. ed.
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index.
REPRODUCTION NOTE
Text of Note
Includes interactive index.
CONTENTS NOTE
Text of Note
An introduction to microelectronic fabrication -- Semiconductor substrates -- Diffusion -- Thermal Oxidation -- Ion Implantation -- Rapid thermal processing -- Optical lithography -- Photoresists -- Nonoptical lithographic techniques -- Vacuum Science and plasmas -- Etching -- Physical deposition: evaporation and sputtering -- Chemical vapor deposition -- Epitaxial growth -- Device isolation, contacts, and metalization -- CMOS technologies -- Other transistor technologies -- Optoelectronic technologies -- MEMS -- Integrated circuit manufacturing.
0
OTHER EDITION IN ANOTHER MEDIUM
International Standard Book Number
0195320174
TOPICAL NAME USED AS SUBJECT
Semiconductors-- Design and construction.
Semiconductors-- Mathematical models.
PERSONAL NAME - PRIMARY RESPONSIBILITY
Campbell, Stephen A.,1954-
PERSONAL NAME - ALTERNATIVE RESPONSIBILITY
Campbell, Stephen A.,1954-
CORPORATE BODY NAME - ALTERNATIVE RESPONSIBILITY
Knovel (Firm)
ORIGINATING SOURCE
Date of Transaction
20110817085102.0
ELECTRONIC LOCATION AND ACCESS
Electronic name
مطالعه متن کتاب [Book]
Y
