عنوان
پدید آورنده
موضوع
رده
TK 7836 .I43 2001
TK
7836
.
I43
2001
کتابخانه
محل استقرار
استان: Khorasan Razavi ـ شهر: Mashhad
OTHER STANDARD IDENTIFIER
Standard Number
24352
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
2001 IEEE International Symposium on Semiconductor Manufacturing, conference proceedings: October 8-10, 2001, San Jose, California
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Piscataway, NJ.
Name of Publisher, Distributor, etc.
Institute of Electrical and Electronics Engineers
Date of Publication, Distribution, etc.
c2001
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xi, 525p.: ill
GENERAL NOTES
Text of Note
"IEEE catalog number 01CH37203" - T.p. verso
Text of Note
Includes biblographical references and index
TOPICAL NAME USED AS SUBJECT
Entry Element
Congresses ، Electronic industries
Entry Element
Design and construction - Congresses ، Semiconductors
Entry Element
Congresses ، Computer integrated manufacturing systems
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7836
.
I43
2001
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
TI
CORPORATE BODY NAME - SECONDARY RESPONSIBILITY
Entry Element
International Symposium on Semiconductor Manufacturing )2001: San Jose, California(
LOCATION AND CALL NUMBER
Call Number Suffix
CL
