TY - BOOK A1 - Marc J. Madou TI - Fundamentals of microfabrication and nanotechnology.dollar5Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / PB - مرکز و کتابخانه مطالعات اسلامی به زبان‌های اروپایی SN - 90035463 UR /book/90035463/Fundamentals-of-microfabrication-and-nanotechnolog/ ER -