@BOOK{ Book!D - 90035463,
AUTHOR = " Marc J. Madou",
TITLE = "Fundamentals of microfabrication and nanotechnology.dollar5Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology /",
LIBRARY= "مرکز و کتابخانه مطالعات اسلامی به زبان‌های اروپایی",
SUBJECT = "Microelectromechanical systems,Microfluidics,Nanoelectromechanical systems,Solid state physics",
URL = "/book/90035463/Fundamentals-of-microfabrication-and-nanotechnolog/"}