@BOOK{ Book!D - 86879504,
AUTHOR = "edited by Suryadevara Babu",
TITLE = "Advances in chemical mechanical planarization )CMP(",
LIBRARY= "کتابخانه مرکز پژوهش متالورژی رازی",
SUBJECT = "، Chemical mechanical planarization,، Nanoelectronics,، Microelectronics,، Chemical mechanical planarization,، Microelectronics,، Nanoelectronics",
URL = "/book/86879504/Advances-in-chemical-mechanical-planarization-CMP/"}