@BOOK{ Book!D - 72166087, AUTHOR = "Ostrikov, K. )Kostya(", TITLE = "Plasma-aided nanofabrication: from plasma sources to nanoassembly", LIBRARY= "كتابخانه مركزی دانشگاه صنعتی شریف", SUBJECT = "، Nanostructured materials,، Plasma engineering,، Low temperature plasmas,، Manufacturing processes", URL = "/book/72166087/Plasmaaided-nanofabrication-from-plasma-sources/"}