@BOOK{ Book!D - 72154967, AUTHOR = "Misra, Ashutosh", TITLE = "Handbook of chemicals and gases for the semiconductor industry", LIBRARY= "كتابخانه مركزی دانشگاه صنعتی شریف", SUBJECT = "Handbooks, manuals, etc ، Chemicals,Handbooks, manuals, etc ، Semiconductors-- Materials", URL = "/book/72154967/Handbook-of-chemicals-and-gases-for-the-semiconduc/"}