@BOOK{ Book!D - 68698574, AUTHOR = "John H. Lau ... [et al.]&", TITLE = "Advanced MEMS packaging", LIBRARY= "كتابخانه دانشگاه صنعتی اروميه", SUBJECT = "Microelectromechanical systems,Microelectronic packaging", URL = "/book/68698574/Advanced-MEMS-packaging/"}