@BOOK{ Book!D - 103379661,
AUTHOR = "/ Sami. Franssila",
TITLE = "introduction to microfabrication",
LIBRARY= "كتابخانه مركزی و مركز اسناد دانشگاه شهيد چمران",
SUBJECT = "Microelectromechanical Systems,Electronic apparatus and appliance,Microfabrication",
URL = "/book/103379661/introduction-to-microfabrication/"}