TY  - BOOK
A1  - editors X.F. Zong, Y.Y. Wang, J. Chen
TI  - Materials and process characterization for VLSI, 1988 )ICMP'88( : proceedings of International Conference October. 24-29, 1988, Shanghai, China
PB  - کتابخانه پژوهشگاه دانشهای بنیادی
SN  - 101377344
UR  /book/101377344/Materials-and-process-characterization-for-VLSI-1/
ER  -