@BOOK{ Book!D - 89944032, AUTHOR = " by Kin P. Cheung.", TITLE = "Plasma Charging Damage", LIBRARY= "مرکز و کتابخانه مطالعات اسلامی به زبان‌های اروپایی", SUBJECT = "Electronics.,Engineering.,Machinery.,Optical materials.,Surfaces (Physics).", URL = "/book/89944032/Plasma-Charging-Damage/"}